In:
Microelectronic Engineering, Elsevier BV, Vol. 170 ( 2017-02), p. 49-53
Type of Medium:
Online Resource
ISSN:
0167-9317
DOI:
10.1016/j.mee.2016.12.028
Language:
English
Publisher:
Elsevier BV
Publication Date:
2017
detail.hit.zdb_id:
1497065-X
detail.hit.zdb_id:
605230-7