In:
Microelectronic Engineering, Elsevier BV, Vol. 194 ( 2018-07), p. 15-18
Type of Medium:
Online Resource
ISSN:
0167-9317
DOI:
10.1016/j.mee.2018.02.028
Language:
English
Publisher:
Elsevier BV
Publication Date:
2018
detail.hit.zdb_id:
1497065-X
detail.hit.zdb_id:
605230-7