In:
Materials Science in Semiconductor Processing, Elsevier BV, Vol. 9, No. 4-5 ( 2006-8), p. 525-530
Type of Medium:
Online Resource
ISSN:
1369-8001
DOI:
10.1016/j.mssp.2006.08.030
Language:
English
Publisher:
Elsevier BV
Publication Date:
2006
detail.hit.zdb_id:
2029689-7