In:
Laser and Particle Beams, Hindawi Limited, Vol. 21, No. 2 ( 2003-04), p. 285-289
Kurzfassung:
The general possibility of the extended (∼30 cm) closed-drift
ion source application for deposition of wear-resistant amorphous hydrogenated carbon (a-C:H) films on large-area dielectric
substrates, in particular, on carbon-fiber plastic, is shown. Parameters of the “ion” and the “plasma”
regimes of the ion source operation in argon and methane are defined. It is shown that the ion current nonuniformity is in
the range of ±5–15% depending on the operation mode. Optimum conditions for the substrate precleaning in argon
and hard, well-adhered a-C:H films deposition from methane are determined. The films are characterized by high hardness (∼11
GPa) and low surface roughness (∼0.13 nm) that leads to a several times lower friction coefficient (0.05) and wear rate
(0.001 μm 3 m −1 N −1 )
compared to glass and carbon-fiber plastic substrates.
Materialart:
Online-Ressource
ISSN:
0263-0346
,
1469-803X
DOI:
10.1017/S0263034603212180
Sprache:
Englisch
Verlag:
Hindawi Limited
Publikationsdatum:
2003
ZDB Id:
2021816-3