In:
Applied Physics Letters, AIP Publishing, Vol. 60, No. 2 ( 1992-01-13), p. 219-221
Abstract:
Mass and energy-dispersive recoil spectrometry, where the recoil energy is derived from the recoil time of flight, has been used to characterize the depth distribution of Al, Ga, and As in an AlxGa(1−x)As quantum-well structure. Signals characterizing the Al, Ga, and As distribution with good separation between Ga and As (average crosstalk & lt;2%) could be obtained from depths less than 560 nm from the surface. The depth resolution of the As signal at the surface was 16 nm FWHM, which is considerably better than achieved using a silicon particle detector (34 nm).
Type of Medium:
Online Resource
ISSN:
0003-6951
,
1077-3118
Language:
English
Publisher:
AIP Publishing
Publication Date:
1992
detail.hit.zdb_id:
211245-0
detail.hit.zdb_id:
1469436-0
