In:
Applied Physics Letters, AIP Publishing, Vol. 87, No. 14 ( 2005-10-03)
Abstract:
We report on the integration of fully functional ferroelectric PbTiO3 nanostructures of typically less than 100nm lateral extension into a low-k dielectric hydrogen silsesquioxane film. Chemical mechanical polishing of the dielectric layer down to an overall thickness below the nanoparticles height exposes the structures. After confirmation of the piezoelectricity of individual embedded grains, gold electrode pads are deposited to characterize several of these grains in parallel. Evidence of ferroelectric switching is observed and discussed within an equivalent circuit model. This paves the way to a better integration and statistical analysis of ferroelectric nanostructures.
Type of Medium:
Online Resource
ISSN:
0003-6951
,
1077-3118
Language:
English
Publisher:
AIP Publishing
Publication Date:
2005
detail.hit.zdb_id:
211245-0
detail.hit.zdb_id:
1469436-0