In:
Review of Scientific Instruments, AIP Publishing, Vol. 79, No. 1 ( 2008-01-01)
Abstract:
A micromachined surface stress sensor has been fabricated and integrated off chip with a low-noise, differential capacitance, electronic readout circuit. The differential capacitance signal is modulated with a high frequency carrier signal, and the output signal is synchronously demodulated and filtered resulting in a dc output voltage proportional to the change in differential surface stress. The differential surface stress change of the Au(111) coated silicon sensors due to chemisorbed alkanethiols is Δσs≈−0.42±0.0028Nm−1 for 1-dodecanethiol (DT) and Δσs≈−0.14±0.0028Nm−1 for 1-butanethiol (BT). The estimated measurement resolution (1Hz bandwidth) is ≈0.12mNm−1 (DT: 0.2pgmm−2 and BT: 0.8pgmm−2) and as high as ≈3.82μNm−1 (DT: 8fgmm−2 and BT: 24fgmm−2) with system optimization.
Type of Medium:
Online Resource
ISSN:
0034-6748
,
1089-7623
Language:
English
Publisher:
AIP Publishing
Publication Date:
2008
detail.hit.zdb_id:
209865-9
detail.hit.zdb_id:
1472905-2
SSG:
11
