In:
Applied Physics Letters, AIP Publishing, Vol. 93, No. 3 ( 2008-07-21)
Kurzfassung:
The metal-insulator-metal (MIM) capacitor for analog and rf applications has been developed with ZrO2∕Al2O3∕ZrO2 laminate as the dielectric. The high capacitance density of 21.54fF∕μm2 can be achieved due to the tetragonal ZrO2 which makes the higher dielectric constant of 38.7. This MIM capacitor also demonstrates the quadratic voltage coefficient of 2443ppm∕V2 and the good leakage current of 2.11×10−6A∕cm2 at 2V which is ascribed to the inserted Al2O3. Since the Schottky emission is suggested as the major dielectric conduction mechanism, a further reduced quadratic voltage coefficient and leakage characteristic can be realized by using a high work-function electrode. The combination of the promising electrical properties and the desirable process integration renders this structure highly suitable for advanced MIM capacitors.
Materialart:
Online-Ressource
ISSN:
0003-6951
,
1077-3118
Sprache:
Englisch
Verlag:
AIP Publishing
Publikationsdatum:
2008
ZDB Id:
211245-0
ZDB Id:
1469436-0