In:
Journal of Applied Physics, AIP Publishing, Vol. 80, No. 6 ( 1996-09-15), p. 3346-3354
Abstract:
Interfacial reactions between (100) InP and thin films of the transition metals Cr, Ni, Pt, and Ti have been studied. A thin layer of metal was deposited onto the InP substrates using e-beam evaporation and parts of the samples were then subjected to heat treatment in vacuum for 30 min at several temperatures up to 500 °C. Separate characterizations of the metal, In, and P depth distributions were carried out using mass and energy dispersive recoil spectrometry. The different crystalline phases observed were determined using x-ray diffraction. The near-noble metals (Ni, Pt) formed ternary phases, while Ti and Cr formed phosphides. The phases formed were generally stable up to 500 °C with the major exception being Pt where the ternary phase decomposed to form PtIn2, PtP2, and Pt3In7.
Type of Medium:
Online Resource
ISSN:
0021-8979
,
1089-7550
Language:
English
Publisher:
AIP Publishing
Publication Date:
1996
detail.hit.zdb_id:
220641-9
detail.hit.zdb_id:
3112-4
detail.hit.zdb_id:
1476463-5
