In:
Applied Physics Letters, AIP Publishing, Vol. 44, No. 12 ( 1984-06-15), p. 1155-1157
Abstract:
The reactive species SiH2 has been directly observed in dc glow discharges using the technique of frequency modulation absorption spectroscopy. The spatial distribution of SiH2 in the discharge and the relative amounts of SiH2 in silane and disilane discharges have been measured.
Type of Medium:
Online Resource
ISSN:
0003-6951
,
1077-3118
Language:
English
Publisher:
AIP Publishing
Publication Date:
1984
detail.hit.zdb_id:
211245-0
detail.hit.zdb_id:
1469436-0
