In:
Semiconductor Science and Technology, IOP Publishing, Vol. 18, No. 3 ( 2003-03-01), p. S59-S66
Type of Medium:
Online Resource
ISSN:
0268-1242
DOI:
10.1088/0268-1242/18/3/308
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
2003
detail.hit.zdb_id:
54647-1
detail.hit.zdb_id:
1361285-2