In:
Semiconductor Science and Technology, IOP Publishing, Vol. 8, No. 1S ( 1993-01-01), p. S176-S179
Type of Medium:
Online Resource
ISSN:
0268-1242
,
1361-6641
DOI:
10.1088/0268-1242/8/1S/040
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1993
detail.hit.zdb_id:
54647-1
detail.hit.zdb_id:
1361285-2