In:
Journal of Micromechanics and Microengineering, IOP Publishing, Vol. 14, No. 3 ( 2004-03-01), p. 398-402
Type of Medium:
Online Resource
ISSN:
0960-1317
,
1361-6439
DOI:
10.1088/0960-1317/14/3/012
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
2004
detail.hit.zdb_id:
1480280-6
detail.hit.zdb_id:
1069644-1