In:
Journal of Micromechanics and Microengineering, IOP Publishing, Vol. 19, No. 8 ( 2009-08-01), p. 085015-
Type of Medium:
Online Resource
ISSN:
0960-1317
,
1361-6439
DOI:
10.1088/0960-1317/19/8/085015
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
2009
detail.hit.zdb_id:
1480280-6
detail.hit.zdb_id:
1069644-1