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Czaplewski, David A ; Nordquist, Christopher D ; Dyck, Christopher W ; [et al.]

IOP Publishing ; 2012

In: Journal of Micromechanics and Microengineering Vol. 22, No. 10 ( 2012-10-01), p. 105005-

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In: Journal of Micromechanics and Microengineering, IOP Publishing, Vol. 22, No. 10 ( 2012-10-01), p. 105005-

Type of Medium: Online Resource

ISSN: 0960-1317 , 1361-6439

URL: Article

DOI: 10.1088/0960-1317/22/10/105005

RVK:

ZG 1100

Language: Unknown

Publisher: IOP Publishing

Publication Date: 2012

detail.hit.zdb_id: 1480280-6

detail.hit.zdb_id: 1069644-1

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