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Park, Chan Woo ; Jung, Soon Won ; Lim, Sang Chul ; [et al.]

IOP Publishing ; 2013

In: Journal of Micromechanics and Microengineering Vol. 23, No. 12 ( 2013-12-01), p. 127002-

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In: Journal of Micromechanics and Microengineering, IOP Publishing, Vol. 23, No. 12 ( 2013-12-01), p. 127002-

Type of Medium: Online Resource

ISSN: 0960-1317 , 1361-6439

URL: Article

DOI: 10.1088/0960-1317/23/12/127002

RVK:

ZG 1100

Language: Unknown

Publisher: IOP Publishing

Publication Date: 2013

detail.hit.zdb_id: 1480280-6

detail.hit.zdb_id: 1069644-1

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