In:
Journal of Micromechanics and Microengineering, IOP Publishing, Vol. 7, No. 4 ( 1997-12-01), p. 316-322
Type of Medium:
Online Resource
ISSN:
0960-1317
,
1361-6439
DOI:
10.1088/0960-1317/7/4/007
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1997
detail.hit.zdb_id:
1480280-6
detail.hit.zdb_id:
1069644-1