In:
Journal of Micromechanics and Microengineering, IOP Publishing, Vol. 28, No. 2 ( 2018-02-01), p. 025011-
Type of Medium:
Online Resource
ISSN:
0960-1317
,
1361-6439
DOI:
10.1088/1361-6439/aaa1f8
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
2018
detail.hit.zdb_id:
1480280-6
detail.hit.zdb_id:
1069644-1