In:
Journal of Micromechanics and Microengineering, IOP Publishing, Vol. 29, No. 7 ( 2019-07-01), p. 075008-
Type of Medium:
Online Resource
ISSN:
0960-1317
,
1361-6439
DOI:
10.1088/1361-6439/ab1d97
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
2019
detail.hit.zdb_id:
1480280-6
detail.hit.zdb_id:
1069644-1