In:
Plasma Sources Science and Technology, IOP Publishing, Vol. 27, No. 1 ( 2018-01-29), p. 015018-
Type of Medium:
Online Resource
ISSN:
1361-6595
DOI:
10.1088/1361-6595/aaa7d0
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
2018
detail.hit.zdb_id:
2004012-X