In:
Semiconductor Science and Technology, IOP Publishing, Vol. 36, No. 11 ( 2021-11-01), p. 115002-
Type of Medium:
Online Resource
ISSN:
0268-1242
,
1361-6641
DOI:
10.1088/1361-6641/ac2314
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
2021
detail.hit.zdb_id:
54647-1
detail.hit.zdb_id:
1361285-2