In:
Chinese Physics B, IOP Publishing, Vol. 30, No. 11 ( 2021-12-01), p. 117401-
Kurzfassung:
For photon detection, superconducting transition-edge sensor (TES) micro-calorimeters are excellent energy-resolving devices. In this study, we report our recent work in developing Ti-/Au-based TES. The Ti/Au TES devices were designed and implemented with a thickness ratio of 1:1 and different suspended structures using micromachining technology. The characteristics were evaluated and analyzed, including surface morphology, 3D deformation of suspended Ti/Au TES device structure, I – V characteristics, and low-temperature superconductivity. The results showed that the surface of Ti/Au has good homogeneity and the surface roughness of Ti/Au is significantly increased compared with the substrate. The structure of Ti/Au bilayer film significantly affects the deformation of suspended devices, but the deformation does not affect the I – V characteristics of the devices. For devices with the Ti/Au bilayer (150 – m × 150 μm) and beams (100 μ m × 25 μm), the transition temperature ( T c ) is 253 mK with a width of 6 mK, and the value of the temperature sensitivity α is 95.1.
Materialart:
Online-Ressource
ISSN:
1674-1056
DOI:
10.1088/1674-1056/abff20
Sprache:
Unbekannt
Verlag:
IOP Publishing
Publikationsdatum:
2021
ZDB Id:
2412147-2
