In:
Nano Express, IOP Publishing, Vol. 2, No. 1 ( 2021-03-01), p. 014002-
Abstract:
A stack of five Al(Ga)N-based quantum wells is investigated by combined laterally and depth resolved cathodoluminescence (CL) spectroscopy in order to distinguish lateral and vertical inhomogeneities of these wells. Transmission electron microscopy (TEM) micrographs provide data for the real sample structure, which enters into the Monte-Carlo simulation of the depth-resolved CL measurements to refine the depth resolution. The comparison of these CL measurements to the results of electron energy loss spectra (EELS) allows to identify local thickness variations of the lower three quantum wells to be the origin of two different luminescence contributions to the overall spectrum. The differentiation of the two groups of quantum wells by depth-resolved CL is demonstrated.
Type of Medium:
Online Resource
ISSN:
2632-959X
DOI:
10.1088/2632-959X/abdad9
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
2021
detail.hit.zdb_id:
3023522-4