In:
Journal of Microelectromechanical Systems, Institute of Electrical and Electronics Engineers (IEEE), Vol. 9, No. 1 ( 2000-03), p. 94-103
Type of Medium:
Online Resource
ISSN:
1057-7157
,
1941-0158
Language:
Unknown
Publisher:
Institute of Electrical and Electronics Engineers (IEEE)
Publication Date:
2000
detail.hit.zdb_id:
2027726-X