In:
Journal of Microelectromechanical Systems, Institute of Electrical and Electronics Engineers (IEEE), Vol. 11, No. 4 ( 2002-08), p. 385-401
Type of Medium:
Online Resource
ISSN:
1057-7157
DOI:
10.1109/JMEMS.2002.800928
Language:
English
Publisher:
Institute of Electrical and Electronics Engineers (IEEE)
Publication Date:
2002
detail.hit.zdb_id:
2027726-X