Online Resource
Institute of Electrical and Electronics Engineers (IEEE)
;
2004
In:
Journal of Microelectromechanical Systems Vol. 13, No. 6 ( 2004-12), p. 972-976
In:
Journal of Microelectromechanical Systems, Institute of Electrical and Electronics Engineers (IEEE), Vol. 13, No. 6 ( 2004-12), p. 972-976
Type of Medium:
Online Resource
ISSN:
1057-7157
DOI:
10.1109/JMEMS.2004.838372
Language:
English
Publisher:
Institute of Electrical and Electronics Engineers (IEEE)
Publication Date:
2004
detail.hit.zdb_id:
2027726-X
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