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Czaplewski, David A. ; Dyck, Christopher W. ; Sumali, Hartono ; [et al.]

Institute of Electrical and Electronics Engineers (IEEE) ; 2006

In: Journal of Microelectromechanical Systems Vol. 15, No. 6 ( 2006-12), p. 1586-1594

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In: Journal of Microelectromechanical Systems, Institute of Electrical and Electronics Engineers (IEEE), Vol. 15, No. 6 ( 2006-12), p. 1586-1594

Type of Medium: Online Resource

ISSN: 1057-7157

URL: Article

DOI: 10.1109/JMEMS.2006.883576

Language: Unknown

Publisher: Institute of Electrical and Electronics Engineers (IEEE)

Publication Date: 2006

detail.hit.zdb_id: 2027726-X

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