Online-Ressource
Institute of Electrical and Electronics Engineers (IEEE)
;
2007
In:
Journal of Microelectromechanical Systems Vol. 16, No. 3 ( 2007-06), p. 684-693
In:
Journal of Microelectromechanical Systems, Institute of Electrical and Electronics Engineers (IEEE), Vol. 16, No. 3 ( 2007-06), p. 684-693
Materialart:
Online-Ressource
ISSN:
1057-7157
DOI:
10.1109/JMEMS.2007.897090
Sprache:
Unbekannt
Verlag:
Institute of Electrical and Electronics Engineers (IEEE)
Publikationsdatum:
2007
ZDB Id:
2027726-X
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