In:
Journal of Microelectromechanical Systems, Institute of Electrical and Electronics Engineers (IEEE), Vol. 22, No. 5 ( 2013-10), p. 989-991
Type of Medium:
Online Resource
ISSN:
1057-7157
,
1941-0158
DOI:
10.1109/JMEMS.2013.2262604
Language:
Unknown
Publisher:
Institute of Electrical and Electronics Engineers (IEEE)
Publication Date:
2013
detail.hit.zdb_id:
2027726-X