In:
Journal of Microelectromechanical Systems, Institute of Electrical and Electronics Engineers (IEEE), Vol. 31, No. 2 ( 2022-4), p. 180-182
Type of Medium:
Online Resource
ISSN:
1057-7157
,
1941-0158
DOI:
10.1109/JMEMS.2022.3141830
Language:
Unknown
Publisher:
Institute of Electrical and Electronics Engineers (IEEE)
Publication Date:
2022
detail.hit.zdb_id:
2027726-X