In:
IEEE Transactions on Semiconductor Manufacturing, Institute of Electrical and Electronics Engineers (IEEE), Vol. 21, No. 2 ( 2008-05), p. 256-262
Type of Medium:
Online Resource
ISSN:
0894-6507
DOI:
10.1109/TSM.2008.2000268
Language:
Unknown
Publisher:
Institute of Electrical and Electronics Engineers (IEEE)
Publication Date:
2008
detail.hit.zdb_id:
2035198-7