In:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, American Vacuum Society, Vol. 19, No. 3 ( 2001-05-01), p. 952-957
Abstract:
Epitaxial W/NbN superlattices with modulation wavelengths Λ ranging from 1.3 to 25 nm were grown on MgO(001) substrates by dc reactive magnetron sputtering in Ar/N2 mixtures. The epitaxial relationship between the layers is given by W(001)‖NbN(001) and W[110]‖NbN[100] . X-ray diffraction and Rutherford backscattering results fitted using simulations showed that the superlattices had well-defined planar layers with interface widths of ≈0.2 nm. Nanoindentation measurements showed superlattice hardnesses as high as 33 GPa compared to 8 for W and 20 for NbN. The superlattices showed little change in x-ray superlattice reflections or nanoindentation hardness after vacuum annealing up to the highest temperature tested, 1000 °C for 6 h. Thus, the layers remained intact during annealing, allowing the superlattice hardness enhancement to be retained.
Type of Medium:
Online Resource
ISSN:
0734-2101
,
1520-8559
Language:
English
Publisher:
American Vacuum Society
Publication Date:
2001
detail.hit.zdb_id:
1475424-1
detail.hit.zdb_id:
797704-9
