In:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, American Vacuum Society, Vol. 21, No. 3 ( 2003-05-01), p. 966-969
Kurzfassung:
We present an approach for two-dimensional photonic crystal fabrication in prestructured multilayer membranes. We show that well-defined structures with submicronic periodicity can be created by focused-ion-beam etching through the membranes. A photonic band gap around 1.5 μm is observed by spectral measurements, in agreement with theoretical simulations. Further improvements are also proposed.
Materialart:
Online-Ressource
ISSN:
1071-1023
,
1520-8567
Sprache:
Englisch
Verlag:
American Vacuum Society
Publikationsdatum:
2003
ZDB Id:
3117331-7
ZDB Id:
3117333-0
ZDB Id:
1475429-0