In:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, American Vacuum Society, Vol. 33, No. 2 ( 2015-03-01)
Abstract:
Recently, thermal neutrons have been identified as a cause of soft errors in advanced electronic devices. To analyze the origin of such errors, dynamic secondary ion mass spectrometry (SIMS), time-of-flight (TOF)-SIMS, and three-dimensional atom probe (3DAP) methods have been used systematically. TOF-SIMS results showed that the existence region of 10B, the source of soft errors, has a high correlation to the existence region of W. Furthermore, 3DAP results for the sample extracted from the area near the W-plug revealed high 10B concentration at the W-plug.
Type of Medium:
Online Resource
ISSN:
2166-2746
,
2166-2754
Language:
English
Publisher:
American Vacuum Society
Publication Date:
2015
detail.hit.zdb_id:
3117331-7
detail.hit.zdb_id:
1475429-0