In:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, American Vacuum Society, Vol. 33, No. 3 ( 2015-05-01)
Abstract:
Field-emission and beam collimation characteristics of single metal nanotip devices with double-gate electrodes are studied. Applying a previously developed method to fabricate all-metal double-gate nanotip arrays with a stacked on-chip extraction Gext and collimation Gcol gate electrodes with the large Gcol apertures, the authors produced single double-gate nanotip devices and measured their beam characteristics. Excellent beam collimation capability with minimal reduction of the emission current and the enhancements of the current density up to a factor of ∼7 was observed. The results indicate that these single nanotip devices are highly promising for electron beam applications that require extremely high brilliance and coherence.
Type of Medium:
Online Resource
ISSN:
2166-2746
,
2166-2754
Language:
English
Publisher:
American Vacuum Society
Publication Date:
2015
detail.hit.zdb_id:
3117331-7
detail.hit.zdb_id:
1475429-0