In:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, American Vacuum Society, Vol. 35, No. 4 ( 2017-07-01)
Abstract:
In this report, the authors will investigate the formation of Au clusters on the nanoscale membrane formed during various surface treatments such as electron beam irradiations, Ga ion focused ion beam (FIB) technique, and thermal treatment. Nanoapertures on the freestanding Au film were fabricated by using FIB technique, and a nanometer scale membrane created in the aperture by various surface treatments. Transmission electron microscopy reveals that Au clusters has formed on the membrane after the sample storage at room temperature for several months. In addition, Au clusters on the carbon-containing membrane were also observed after surface treatments of Ga ion beam etching, and thermal heating of freestanding 40 nm thick Au film at temperatures ranging from 400 to 800 °C. Spinodal decomposition, spinodal dewetting, and coalescence of the Au particles on the carbon-containing membrane were also observed.
Type of Medium:
Online Resource
ISSN:
2166-2746
,
2166-2754
Language:
English
Publisher:
American Vacuum Society
Publication Date:
2017
detail.hit.zdb_id:
3117331-7
detail.hit.zdb_id:
1475429-0
