Online Resource
American Vacuum Society
;
1982
In:
Journal of Vacuum Science and Technology Vol. 20, No. 4 ( 1982-04), p. 946-947
In:
Journal of Vacuum Science and Technology, American Vacuum Society, Vol. 20, No. 4 ( 1982-04), p. 946-947
Type of Medium:
Online Resource
ISSN:
0022-5355
Language:
English
Publisher:
American Vacuum Society
Publication Date:
1982
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