In:
Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena, American Vacuum Society, Vol. 4, No. 2 ( 1986-03-01), p. 568-570
Kurzfassung:
We have constructed a solid arsenic source cracking furnace and have compared the cracking patterns with four different cracking baffle materials: graphite, tantalum, PBN, and molybdenum. The results show that a definite baffle material effect is observed. For graphite, molybdenum, and PBN, greater decomposition is favored at high temperatures, with the PBN baffles being the least effective. For tantalum baffles, an optimal temperature window is obtained and the dimer content drops at temperatures above 850 °C.
Materialart:
Online-Ressource
ISSN:
0734-211X
,
2327-9877
Sprache:
Englisch
Verlag:
American Vacuum Society
Publikationsdatum:
1986
ZDB Id:
3117331-7
ZDB Id:
1475429-0
