In:
Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena, American Vacuum Society, Vol. 6, No. 3 ( 1988-05-01), p. 884-885
Type of Medium:
Online Resource
ISSN:
0734-211X
,
2327-9877
Language:
English
Publisher:
American Vacuum Society
Publication Date:
1988
detail.hit.zdb_id:
3117331-7
detail.hit.zdb_id:
1475429-0