In:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, American Vacuum Society, Vol. 16, No. 6 ( 1998-11-01), p. 3298-3300
Abstract:
Self-assembled alkyl monolayers on Si (111) were exposed to low doses of slow (v≈6.6×105 m/s≈0.3vBohr), highly charged ions, like Xe41+ and Th73+. Atomic force microscope images show craters from single ion impacts with diameters of 50–63 nm. Emission of secondary ions by highly charged projectiles was monitored by time-of-flight secondary ion mass spectrometry (TOF-SIMS). TOF-SIMS data give insights into the dependence of electronic desorption effects on the projectile charge state. We discuss the potential of highly charged projectiles as tools for materials modification on a nanometer scale.
Type of Medium:
Online Resource
ISSN:
1071-1023
,
1520-8567
Language:
English
Publisher:
American Vacuum Society
Publication Date:
1998
detail.hit.zdb_id:
3117331-7
detail.hit.zdb_id:
3117333-0
detail.hit.zdb_id:
1475429-0