In:
Journal of Micro/Nanolithography, MEMS, and MOEMS, SPIE-Intl Soc Optical Eng, Vol. 11, No. 2 ( 2012-06-26), p. 029802-1-
Type of Medium:
Online Resource
ISSN:
1932-5150
DOI:
10.1117/1.JMM.11.2.029802
Language:
English
Publisher:
SPIE-Intl Soc Optical Eng
Publication Date:
2012
detail.hit.zdb_id:
3056313-6