In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 30, No. 9R ( 1991-09-01), p. 1959-
Abstract:
A method for the growth of as-deposited superconducting thin films which combines YAG-laser ablation and oxidation by an electron cyclotron resonance (ECR)-excited oxygen plasma is described. It is demonstrated by depositions on YSZ and SrTiO 3 substrates that this one-step method is compatible with the requirements of large surface homogeneity, low substrate temperature and low oxygen partial pressure. The method is therefore well suited for applications in micro-electronics.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.30.1959
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1991
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7