In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 30, No. 3A ( 1991-03-01), p. L355-
Kurzfassung:
Laser etching of the Bi-Sr-Ca-Cu-O superconducting thin films is studied using the second harmonic light of a Nd:YAG laser (530 nm, 40 mW, 2 kHz). With use of a laser beam of high energy density, the etching speed exceeds 10 mm/s, but a region of degradation exists around etching lines and precise control of etching depth is difficult. Under the low-energy and prolonged irradiation condition, there is some enhancement of laser etching by the addition of reactive gases. The result suggests the possibility of very fine etching in a layer-by-layer manner for high T c superconducting films by the laser assist etching.
Materialart:
Online-Ressource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.30.L355
Sprache:
Unbekannt
Verlag:
IOP Publishing
Publikationsdatum:
1991
ZDB Id:
218223-3
ZDB Id:
797294-5
ZDB Id:
2006801-3
ZDB Id:
797295-7