In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 31, No. 4R ( 1992-04-01), p. 1065-
Abstract:
The authors describe the multilayer coatings deposited using a magnetron sputtering method and their characteristics. In Al 2 O 3 /SiO 2 multilayer mirrors fabricated on Si and SiC substrates, reflectivities of more than 99% are obtained both in XeCl and KrF excimer-laser wavelength regions. For antireflective windows, a reflectivity of 1% is obtained in SiO 2 /Al 2 O 3 /SiO 2 trilayer systems coated on both sides of a CaF 2 substrate in the two wavelength regions. In XeCl laser-beam irradiation tests, the fabricated multilayers show higher optical damage thresholds than do typical commercial mirrors. Furthermore, the multilayers show no reflection spectral change, even when heated to 800°C.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.31.1065
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1992
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7