In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 32, No. 12S ( 1993-12-01), p. 6185-
Abstract:
Photoablation of synthetic fused quartz by simultaneous irradiation of multi-wavelength beams of a vacuum-ultraviolet (VUV) laser using high-order anti-Stokes Raman scattering is described. The VUV laser, which emits widely spread Raman-shifted lines from 133 nm to 594 nm, is ideal for effective laser ablation of the fused quartz. The well-defined patterns with a cross-sectional profile of a rectangular shape are formed by using a contact mask at an ablation rate as high as 13 nm/s. An effective absorption coefficient of 3.4×10 -5 cm -1 , which indicates that the multi-wavelength irradiation effect has an important role in the process, is obtained.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.32.6185
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1993
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
