In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 32, No. 12B ( 1993-12-01), p. L1801-
Abstract:
A spiral coil of double-Nb layers is fabricated to investigate the thermal degradation mechanism of Nb multi-layer wiring. The superconductivity of the coil with a sputtered SiO 2 insulation layer easily deteriorates as a result of surface oxidation where the step coverage is incomplete. Higher critical current and thermal stability are obtained by a combination of planarization using spin-coated SiO 2 for the insulation between Nb wiring, surface nitridation of Nb, and taper etching of the contact hole. The critical current of the coil with a spin-coated SiO 2 film is about twice that of a coil with sputtered SiO 2 ; even though it was baked at 300°C for 30 min for each layer.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.32.L1801
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1993
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7