In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 34, No. 4A ( 1995-04-01), p. L465-
Abstract:
A low-energy neutral stream is generated by charge exchange reactions between the accelerated ions in an electron cyclotron resonance plasma stream and the background molecules and atoms. This stream is extracted using a parallel magnetic field to eliminate charged particles. Etched Si profiles demonstrate that this neutral stream has high directionality.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.34.L465
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1995
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7