In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 35, No. 5S ( 1996-05-01), p. 3093-
Kurzfassung:
Surface acoustic waves (SAW) with a shear horizontal polarized displacement (SH-SAW) can be used to determine mechanical and electrical properties of an adjacent liquid. We propose a new multichannel SH-SAW microsensor for liquid characterization. The SH-SAW microsensor, which is fabricated on 36° rotated Y -cut X -propagating LiTaO 3 , consists of three SAW delay lines. The propagating surfaces of two of the delay lines are metallized and electrically shorted, and the other one has a free surface which is an electrically active area. The viscosity, conductivity and permittivity of liquid are obtained simultaneously using the multichannel SH-SAW microsensor.
Materialart:
Online-Ressource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.35.3093
Sprache:
Unbekannt
Verlag:
IOP Publishing
Publikationsdatum:
1996
ZDB Id:
218223-3
ZDB Id:
797294-5
ZDB Id:
2006801-3
ZDB Id:
797295-7