In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 35, No. 7R ( 1996-07-01), p. 4081-
Abstract:
Positive ions were measured in situ by direct sampling from CF 4 discharge space at 13.56 MHz using a quadrupole mass spectrometer. CF 3 + is observed predominantly with smaller amounts of CF 2 + and CF + . With increasing RF power, both CF 2 + and CF + shift to the lower energy side of CF 3 + , and their intensities tend to increase. Such a phenomenon is also observed as controlling the potential of a sampling tip externally. These seem to suggest that CF 2 + and CF + are produced mainly in the sheath region.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.35.4081
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1996
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
