In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 35, No. 8R ( 1996-08-01), p. 4503-
Abstract:
Influences of the axial magnetic field and Faraday shield on the performance of RF produced plasma using a spiral antenna are investigated. The RF power and filling pressure dependences, antenna-plasma coupling, Ar line intensities and spatial profiles of plasma parameters are studied. With the magnetic field and/or without a Faraday shield, the threshold input power for plasma initiation is lowered and the antenna-plasma coupling is improved. In addition, a collisionless heating mechanism is suggested. With the increase in the applied magnetic field, the ion saturation current increases and shows a peaked radial profile; in the low-pressure range it shows a nearly flat axial profile.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.35.4503
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1996
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7